Item

Part description

Qty.

  1

SiC Paddle 2” square shaft, TL = 2260 mm

  3

  2

SiC Paddle 1 1/4” square shaft , TL = 2250 mm

  4

  3

SiC Paddle 1 1/4” square shaft , TL = 1100 mm

  1

  4

SiC Paddle 1 1/4” square shaft , slotted , 2125 mm

  1

  5

SiC Boat , Slots = 166 , Spacing = 3/16” , TL = 845 mm , 150 mm Wafer Production

  2

   6

Torch Interconnect

  2

  7

Torch Chamber

  1